USEFIB SEM

The JEOL 'Fabrika' is based upon a JEOL 6500F SEM with an Orsay Physics Ga+ ion column attached.

The JEOL 'Fabrika' is based upon a JEOL 6500F SEM with an Orsay Physics Ga+ ion column attached.

The 6500F SEM forms an electron spot at the 1nm resolution level