USEFIB Ion Column

The JEOL 'Fabrika' is based upon a JEOL 6500F SEM with an Orsay Physics Ga+ ion column attached.

The Orsay Physics Ion column will produce a Ga+ ion probe down to the 7nm resolution level.

Facilities are available to introduce reactive gases for:

1. Pt metal deposition
2. W metal deposition
3. SiO₂ deposition
4. Cl₂ enhanced etching
5. F₂ enhanced etching

Complex patterns can be generated by the instument, where necessary, supported by a Raith pattern generator running Elphy Quantum software