The University of Sheffield
Electron Beam Lithography

Short-Period Diffraction Gratings

EBL has been used to pattern short-period gratings for a range of devices. Gratings with a period of 200nm, as pictured below, are currently being incorporated into the fabrication of 1.3 micron DFB lasers with the aim of achieving single mode emission. Similar short-period gratings are also being added to solar cells in order to enhance the light coupling efficiency.

Grating with a period of 200nm